e-Journal of Surface Science and Nanotechnology

  1. [ Advance Publication ] [ Title ] Atomic Scale Insights into Si Transport Pathway in Si-oxide Film Based on Theoretical Investigation of Medium Density Effects [ Author ] Hiroyuki Kageshima,Toru Akiyama,Kenji Shiraishi [ Advance Pub. date ] 2025-07-17 [ DOI ] https://doi.org/10.1380/ejssnt.2025-043